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Precise pitch-scaling of carbon nanotube arrays within three-dimensional DNA nanotrenches

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发表刊物:Science
摘要:Precise fabrication of semiconducting carbon nanotubes (CNTs) into densely aligned evenly spaced arrays is required for ultrascaled technology nodes. We report the precise scaling of inter-CNT pitch using a supramolecular assembly method called spatially hindered integration of nanotube electronics. Specifically, by using DNA brick crystal-based nanotrenches to align DNA-wrapped CNTs through DNA hybridization, we constructed parallel CNT arrays with a uniform pitch as small as 10.4 nanometers, at an angular deviation <2° and an assembly yield >95%.
卷号:368
发布期刊链接:https://www.science.org/doi/10.1126/science.aaz7440