Impact Factor:1.584
DOI number:10.1063/1.5128522
Affiliation of Author(s):北京大学
Journal:Rev. Sci. Instrum
Place of Publication:美国
Key Words:plasma flood gun (PFG),miniaturized ECR,wafer charge neutralization,no metallic contamination, limitless lifetime
Indexed by:Journal paper
Discipline:Natural Science
First-Level Discipline:Physics
Document Type:J
Volume:91, 033319
Translation or Not:no
Date of Publication:2020-05-20
Included Journals:SCI、EI
Date of Publication:2020-05-20
彭士香
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Academic Title:
Degree:Doctoral degree
Status:Employed
School/Department:重离子物理研究所
Paper Publications
A miniaturized ECR plasma flood gun for wafer charge neutralization
Date of Publication:2020-05-20 Hits: